Rocky Mountain Micro Machining
MEMS fabrication process development and rapid prototyping services
WHO WE ARE
Founded in September of 2019, Rocky Mountain Micro Machining (RM3) is a Canadian microfabrication company specializing in MEMS process development, rapid prototyping and low volume manufacturing services.
OUR VISION.
In the MEMS industry, there is an enormous gap between initial proof of concept/prototyping, and high volume manufacturing. RM3's vision is to bridge this gap, providing our customers with the highest quality MEMS products and services, at competitive prices, while providing an exceptional customer service experience.
OUR VALUES.
We pride ourselves in our passion, creativity, determination, and resilience. We embrace difficulty and understand that innovative devices demand hard work and creative solutions. If it was easy, everyone would do it. We are a scrappy bunch that understand what it takes to get things done.
From small scale academic projects to larger scale, fast paced, high tech start-ups, we have enabled numerous customers across several industries.
our space.
RM3 operates mainly out of a 22,000 square foot cleanroom, characterization and laboratory facility located on the University of Alberta campus, nestled in the heart of the River Valley in Edmonton, Alberta, Canada. We have access to over $110 million in specialized equipment and infrastructure including over 200 pieces of equipment providing complete capabilities for microscopy, spectroscopy, materials analysis, lithography, thin-film deposition, wet/dry etching, and wafer bonding. Current renovation will increase cleanroom workspace from 3,400 square feet to 5,500 square feet.
Working With Us
RM3 focuses on four areas of expertise designed to provide our customers with an uninterrupted path from early-stage design, proof of concept, and rapid prototyping to manufacturing in low to medium volumes, significantly reducing costs and time to market.
Process Development
We strive to develop clever fabrication processes that meet our customers requirements, with the ultimate goal of converging on a process that is robust, cost effective and amenable to manufacturing in large volume.
Low-Medium Volume Production
RM3 is able to provide our customers with a stable supply of MEMS products to support further development and commercial activities. During this phase we continue to refine the fabrication process, making improvements that render it more amenable to manufacturing and process transfer to a high volume manufacturing facility.
Rapid Prototyping
In the early stages of development, time can be critical in cycling through design concepts and fabrication strategies. We pride ourselves in iterating on these cycles as quickly as possible getting working prototypes into our customers hands for testing, accelerating the feedback loop to quickly converge on a design or process that is amenable to fabrication in larger volume.
Technology Transfer
RM3 has partnership arrangements with well-established MEMS foundries for high volume manufacturing of MEMS products. We actively engage in and facilitate the process transfer to our foundry partner, ensuring a seamless transition from early development to high volume manufacturing, while providing our customers with an interrupted supply of MEMS products. Upon transfer, our customers can continue to rely on RM3 as a reliable second source.
Our Capabilities
From small scale academic projects to larger scale, fast paced start-up projects, we have enabled many customers across several industries.
Lithography
Contact and non-contact
Thin Film Deposition and Growth
Evaporation – Sputter – LPCVD – PECVD – ALD – Thermal Oxidation
Plasma Etch and Removal Tools
RIE – ICPRIE – Vapor HF – XeF2
Thin Film Patterning
Metal Etch – Liftoff – Shadow Masking
Glass and Silicon Wet Etch
KOH – TMAH - HF
Wafer Bonding
Anodic – Thermocompression – Eutectic - Polymer
Dicing and Drilling
Lithography
Contact and non-contact
Contact – Direct Write – E-beam
Dedicated 1000 sq. ft. vibration isolated lithography area for ultra violet, electron beam and laser writing capabilities. 5” and 7” photomask fabrication services.
- Heidelberg MLA 150 (direct write)
- SUSS MA/BA6 Mask/Bond Aligner (contact)
- Heidelberg DWL-200 Pattern Generator
- Raith Voyager Ultra-High resolution EBL system.
- Laurell/Headway Spinner/Hotplate Systems (x2)
- Cee 200CB Coat-Bake System (x2)
- Sono-Tek ExactaCoat Spray Coater
- YES HMDS Vapor Prime Oven
- Brewer Spinner and Hotplate
- Stir-Kool SK-12D (cold plate)
- Dymax BlueWave 200
- Litho Develop Wet Deck (x2)
- Nanoscribe Photonic Professional GT
- Yamato Bake Oven
Contact – Direct Write – E-beam
4 µm dots on a 4 µm pitch, reactive ion etched into a thermal oxide layer. Extensive areas of defect-free patterned features.
Contact – Direct Write – E-beam
A - Patterned gold bond pads/traces/electrodes on a borofloat glass substrate. B - Enlarged view at convergence point of 20 electrode traces. 20 x 10 µm gold electrodes on a 20 µm pitch.
Contact – Direct Write – E-beam
200 µm tall silicon posts etched inside a 200 µm deep trench. Pattern transfer on surfaces with high topographical variations.
Testimonials
We believe in letting our clients' experiences speak for themselves. Here's what some of them have to say.
OUR CUSTOMERS
We have served a variety of customers in the biomedical, aerospace, microelectronic, telecommunications, and RF industries. From small scale academic projects to large scale, fast paced, high tech start-ups, we have enabled many customers across several industries.
Let’s Chat!
If you would like to learn more about our services, capabilities or how RM3 can help you, just send us a message to get started. We’d love to hear from you.